Ndayibona ingxelo enjalo kwakudala: izazinzulu zaseJamani, eJapan nakwamanye amazwe zichithe iminyaka emi-5 kwaye zachitha phantse i-yuan yezigidi ezili-10 ukwenza ibhola eyenziwe ngezinto ezicocekileyo zesilicon-28. Le bhola yesilicon ecocekileyo ye-1kg ifuna ukuchaneka kwe-Ultra-precision machining, ukugawula kunye nokupholisha, umlinganiselo ochanekileyo (i-sphericity, uburhabaxa kunye nomgangatho), kunokuthiwa yeyona bhola ingqukuva emhlabeni.
Makhe sazise inkqubo yokugulisa echanekileyo.
01 Umahluko phakathi kokusila nokupholisha
Ukugaya: Ukusebenzisa amaqhekeza abrasive afakwe okanye acinezelwe kwisixhobo sokugaya, umphezulu ugqitywe yintshukumo ehambelana nesixhobo sokugaya kunye nomsebenzi phantsi koxinzelelo oluthile. Ukugaya kungasetyenziselwa ukucubungula izinto ezahlukeneyo zetsimbi kunye nezingezizo ezentsimbi. Iimilo zomphezulu ezicutshungulweyo ziquka iplanethi, i-cylindrical yangaphakathi kunye nengaphandle kunye ne-conical surfaces, i-convex kunye ne-concave spherical surfaces, imisonto, imiphezulu yamazinyo kunye nezinye iiprofayili. Ukuchaneka kokucubungula kunokufikelela kwi-IT5 ~ IT1, kwaye ubuninzi bomhlaba bunokufikelela kwi-Ra0.63 ~ 0.01μm.
Polishing: Indlela yokulungisa eyehlisa uburhabaxa bomphezulu wesixhobo sokusebenza ngoomatshini, imichiza okanye isenzo se-electrochemical ukufumana indawo eqaqambileyo negudileyo.
Umahluko omkhulu phakathi kwezi zimbini kukuba ukugqitywa komphezulu okuphunyezwe ngokugudiswa kuphezulu kunokusila, kwaye iindlela zekhemikhali okanye ze-electrochemical zingasetyenziswa, ngelixa ukucola kusetyenziswa iindlela zoomatshini kuphela, kwaye ubungakanani beenkozo ezirhabaxa obusetyenzisiweyo burhabaxa kunoko busetyenziselwa. ukupholisha. Oko kukuthi, ubukhulu besuntswana bukhulu.
02 Itekhnoloji yokupholisha echanekileyo
I-Ultra-precision polishing ngumphefumlo weshishini lanamhlanje le-elektroniki
Injongo yetekhnoloji yokupolisha echaneke kakhulu kushishino lwale mihla lwe-elektroniki ayikona nje ukuthambisa izinto ezahlukeneyo, kodwa kunye nokuthambisa imathiriyeli enamaleko amaninzi, ukuze amaqebengwana e-silicon eemilimitha ezimbalwa zesikwere enze amashumi amawaka ukuya kwi-VLSI equlunqwe zizigidi zeemilimitha. iitransistor. Ngokomzekelo, ikhompyutha eyenziwe ngabantu itshintshile ukusuka kumashumi eetoni ukuya kumakhulu eegram namhlanje, into engenakuqondwa ngaphandle kokucoliseka okucokisekileyo.
Ukuthatha ukwenziwa kwe-wafer njengomzekelo, ukupolisha linyathelo lokugqibela lenkqubo yonke, injongo kukuphucula iziphene ezincinci ezishiywe yinkqubo yangaphambili yokusetyenzwa kwe-wafer ukufumana eyona parallelism ingcono. Inqanaba leshishini lengcaciso ye-optoelectronic yanamhlanje ifuna iimfuno ezithe kratya nangakumbi zeparallelism yezixhobo ze-optoelectronic substrate ezifana nesafire kunye nesilicon enye yekristale, efikelele kwinqanaba le-nanometer. Oku kuthetha ukuba inkqubo yokupolisha iye yangena kwinqanaba le-ultra-precision ye-nanometers.
Indlela ebaluleke ngayo inkqubo yokucoca i-ultra-precision kwimveliso yanamhlanje, imimandla yesicelo sayo inokuchaza ngokuthe ngqo ingxaki, kubandakanywa ukuveliswa kweesekethe ezidibeneyo, izixhobo zonyango, iinxalenye zemoto, izixhobo zedijithali, ukubunjwa okuchanekileyo kunye ne-aerospace.
Itekhnoloji ephezulu yokupolisha ilawulwa kuphela ngamazwe ambalwa afana ne-United States ne-Japan
Isixhobo esingundoqo somatshini wokupholisa "yidiski yokugaya". I-Ultra-precision polishing ineemfuno eziphantse zingqongqo ekubunjweni kwezinto eziphathekayo kunye neemfuno zobugcisa bediski yokusila kumatshini wokupholisa. Olu hlobo lwe-disc yensimbi eyenziwe kwizinto ezikhethekileyo akumele ihlangabezane nokuchaneka kwe-nano-level yokusebenza ngokuzenzekelayo, kodwa ibe ne-coefficient echanekileyo yokwandisa i-thermal.
Xa umatshini wokupolisha usebenza ngesantya esiphezulu, ukuba ukwandiswa kwe-thermal kubangela ukuguqulwa kwe-thermal ye-disc yokusila, i-flatness kunye ne-parallelism ye-substrate ayinakuqinisekiswa. Kwaye olu hlobo lwempazamo yokuguqulwa kwe-thermal olungenakuvunyelwa ukuba lwenzeke alukho iimilimitha ezimbalwa okanye ii-microns ezimbalwa, kodwa ii-nanometers ezimbalwa.
Okwangoku, iinkqubo eziphezulu zokupholisha zamazwe ngamazwe ezifana ne-United States ne-Japan sele zikwazi ukuhlangabezana neemfuno zokupolisha ezichanekileyo ze-60-intshi ye-substrate ye-substrate ekrwada (enkulu kakhulu). Ngokusekwe koku, baye bafunda itekhnoloji engundoqo yeenkqubo zokupolisha ezichanekileyo kwaye balibambe ngokuqinileyo inyathelo kwintengiso yehlabathi. . Ngapha koko, ukubamba ubuchwephesha bukwalawula uphuhliso lweshishini lokuvelisa i-elektroniki ukuya kwinqanaba elikhulu.
Ndijongene nesithintelo esingqongqo sobuchwephesha, kwibala lokucocwa kwe-ultra-precision, ilizwe lam linokuziqhubela uphando ngokwangoku.
Lithini inqanaba letekhnoloji yaseTshayina yokuchaneka kwe-Ultra-precision?
Ngapha koko, kwintsimi ye-ultra-precision polishing, i-China ayikho ngaphandle kweempumelelo.
Kwi-2011, i-"Cerium Oxide Microsphere Particle Size Standard Material and Its Preparation Technology" ephuhliswe liqela likaDkt Wang Qi ovela kwiZiko leSizwe leNanoscale Sciences ye-Chinese Academy of Sciences iphumelele ibhaso lokuqala le-China Petroleum kunye ne-Chemical Industry. IMbasa yeTekhnoloji yokuNgenisa iTekhnoloji, kunye nemilinganiselo ye-nanoscale yesayizi yezixhobo ezisemgangathweni Ifunyenwe ilayisenisi yesixhobo sokulinganisa sesizwe kunye nesiqinisekiso somgangatho wesizwe somgangatho wokuqala. Isiphumo sovavanyo lwemveliso ye-ultra-precision ye-polish yezinto ezintsha ze-cerium oxide zigqithise izinto zemveli zangaphandle kwi-swoop enye, igcwalisa isithuba kule ntsimi.
Kodwa uGqr. Wang Qi wathi: “Oku akuthethi ukuba sinyukele phezulu kweli candelo. Kuyo yonke inkqubo, kukho ulwelo lokupholisha kuphela kodwa akukho matshini wokupolisha ochaneke kakhulu. Ubukhulu becala, sithengisa izinto zokwakha kuphela.”
Ngo-2019, iqela lophando likaNjingalwazi uYuan Julong weYunivesithi yaseZhejiang yeTekhnoloji lenze itekhnoloji yokusetyenzwa kweekhemikhali zemichiza. Uluhlu lweematshini zokupholisa eziphuhlisiwe ziye zaveliswa ngobuninzi nguYuhuan CNC Machine Tool Co., Ltd., kwaye zichongwe njengeglasi ye-iPhone4 kunye ne-iPad3 yi-Apple. Esona sixhobo sokugudisa esichanekileyo ehlabathini sephaneli kunye ne-aluminium alloy backplane yokupholisha, ngaphezu kwe-1,700 koomatshini bokupholisha basetyenziselwa imveliso enkulu ye-iPhone kunye neepleyiti zeglasi ze-iPad.
Umtsalane wokucutshungulwa koomatshini ulele kule nto. Ukuze ulandele isabelo semarike kunye nenzuzo, kufuneka uzame konke okusemandleni akho ukubamba abanye, kwaye inkokeli yetekhnoloji iya kuhlala iphucula kwaye iphucula, icocwe ngakumbi, ikhuphisane rhoqo kwaye ibambe, kwaye ikhuthaze uphuhliso olukhulu lwe. iteknoloji yabantu.
Ixesha lokuposa: Mar-08-2023
